Optical metrology

Optical Metrology Third Edition

Optical Metrology of Thin Films

A non-contact and non-destructive laser-based acoustic technique called impulsive stimulated thermal scattering (ISTS) is demonstrated for new applications in the context of a compact, portable apparatus. ISTS is used to determine viscoelastic and thermal transport properties of a DuPont Kapton film before and after neutron irradiation to determine the changes that would be expected to occur in...

Optical Metrology under Extreme Conditions

Optical metrology provides full field, noncontact, precise measurement of various physical parameters of materials, structures, and devices. These properties include kinematic parameters (displacement, velocity, and acceleration), deformation parameters (strains, curvature, and twist), surface parameters (shape and roughness), and mechanical properties of materials (Young’s modulus, Poisson’s r...

Wholefiled Optical Metrology: Surface Displacement Measurement Wholefield Optical Metrology: Surface Displacement Measurement

Basic Wavefront Aberration Theory for Optical Metrology

VIII. IX. X. XI. XII. Sign Conventions Aberration-Free Image Spherical Wavefront, Defocus, and Lateral Shift Angular, Transverse, and Longitudinal Aberration Seidel Aberrations A. Spherical Aberration B. Coma C. Astigmatism D. Field Curvature E. Distortion Zernike Polynomials Relationship between Zernike Polynomials and Third-Order Aberrations Peak-to-Valley and RMS Wavefront Aberration Strehl ...